Brooks-instrument 5861E User Manual

Installation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861EModel 5861EMass Flowmeter

2-2Model 5861ESection 2 InstallationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20082-3 Return ShipmentPrior

2-3Model 5861ESection 2 InstallationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008PIN NO. FUNCTION COLOR CO

2-4Model 5861ESection 2 InstallationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Recommended installation

2-5Model 5861ESection 2 InstallationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20082-7 Electrical Interfacin

2-6Model 5861ESection 2 InstallationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008THIS PAGE WASINTENTIONALL

3-1Model 5861ESection 3 OperationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20083-1 Theory of OperationThe t

3-2Model 5861ESection 3 OperationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20083-2 Operating Procedurea. Ap

3-3Model 5861ESection 3 OperationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008To check zero always mount t

3-4Model 5861ESection 3 OperationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Figure 3-2 Model 5861E Calib

3-5Model 5861ESection 3 OperationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008f. Shut off the flow. Connec

Installation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861EESD (Electrostatic Discharge)Essential Instruction

3-6Model 5861ESection 3 OperationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20083. Adjust the linearity pote

4-1Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20084-1 GeneralNo routine main

4-2Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Trouble Possible Cause Che

4-3Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008A. System ChecksThe Model

4-4Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008sensor assembly is defecti

4-5Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20084-4 Disassembly and Assemb

4-6Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008B. AssemblyNote: It is rec

4-7Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20084-5 Use of the Conversion

4-8Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Table 4-3 Conversion Facto

4-9Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Table 4-3 Conversion Facto

Installation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861EDear Customer,We appreciate this opportunity to se

4-10Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008It is generally accepted

4-11Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Example:The desired gas i

4-12Model 5861ESection 4 MaintenanceInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Figure 4-1 Restrictor Ele

5-1Model 5861ESection 5 Parts ListInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20085-1 GeneralWhen ordering pa

5-2Model 5861ESection 5 Parts ListInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Figure 5-1 Model 5861E Part

5-3Model 5861ESection 5 Parts ListInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008ItemNo. Qty. Description Pa

5-4Model 5861ESection 5 Parts ListInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008 5850 Series Service Tool K

A-1Model 5861ESection A CE CertificationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008DanskBrooks Instrumen

A-2Model 5861ESection A CE CertificationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008EnglishBrooks Instrum

A-3Model 5861ESection A CE CertificationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008FrançaisBrooks Instru

Installation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861ETHIS PAGE WASINTENTIONALLYLEFT BLANK

A-4Model 5861ESection A CE CertificationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008NederlandsBrooks Inst

A-5Model 5861ESection A CE CertificationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008NorskBrooks Instrumen

A-6Model 5861ESection A CE CertificationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008SuomiBrooks Instrumen

Installation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861ETHIS PAGE WASINTENTIONALLYLEFT BLANK

Installation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861ETRADEMARKSBrooks ...

iContentsInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861EParagraph PageNumber NumberSection 1 Intr

iiContentsInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861EFiguresFigure PageNumber Number2-1 Model

1-1Section 1 IntroductionInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861E1-1 PurposeThe Brooks® Mo

1-2Section 1 IntroductionInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 2008Model 5861EControl / Usable Range50

2-1Model 5861ESection 2 InstallationInstallation and Operation ManualX-TMF-5861E-MFM-engPart Number: 541B107AAGNovember, 20082-1 Receipt of EquipmentW