Brooks-instrument Mfi Series User Manual

Installation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Brooks® Mf SeriesNEMA 4X and IP66 Mass Flow Controllers and M

1-2Brooks® Mf SeriesSection 1 IntroductionInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009and positions the p

1-3Section 1 IntroductionBrooks® Mf SeriesInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Repeatability0.25%

1-4Brooks® Mf SeriesSection 1 IntroductionInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20091-5 Electrical Spe

1-5Section 1 IntroductionBrooks® Mf SeriesInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Table 1-3 Mf Series

1-6Brooks® Mf SeriesSection 1 IntroductionInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure 1-4 Mf Serie

1-7Section 1 IntroductionBrooks® Mf SeriesInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure 1-5 Model Mf

1-8Brooks® Mf SeriesSection 1 IntroductionInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure 1-7 Model Mf

1-9Section 1 IntroductionBrooks® Mf SeriesInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure 1-9 Model Mf

1-10Brooks® Mf SeriesSection 1 IntroductionInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure 1-11 Model

2-1Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 20092-1 GeneralThis section

Installation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Brooks® Mf SeriesESD (Electrostatic Discharge)Essential Instr

2-2Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 20092-4 Return ShipmentPrio

2-3Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 20092-7 Gas ConnectionsRefe

2-4Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 2009Recommended installatio

2-5Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 2009pressures and/or pressu

2-6Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 2009Figure 2-1 Common Elect

2-7Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 2009Figure 2-2 Recommended

2-8Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 20092-10 Electrical Interfa

2-9Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 20092-11 Configuring PC Boa

2-10Brooks® Mf SeriesSection 2 InstallationInstallation and Operation ManualX-TMF-Mfi-Mfx-engPart Number: 541B074AAGAugust, 2009THIS PAGE WASINTENTION

3-1Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20093-1 Theory of Operatio

Installation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Brooks® Mf SeriesDear Customer,We appreciate this opportunity

3-2Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009• Precision 5 Volt Ref

3-3Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure 3-2 Flow Contro

3-4Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20093-4 Calibration Proced

3-5Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009f. Connect the DVM pos

3-6Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009stabilized for at leas

3-7Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Example:What is the pe

3-8Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20093-5 ResponseFast Respo

3-9Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009seconds after setpoint

3-10Brooks® Mf SeriesSection 3 OperationInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009THIS PAGE WASINTENTIO

4-1Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 200

Installation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Brooks® Mf Series Mf Series Summary Installation Overview (s

4-2Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 200

4-3Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 200

4-4Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 200

4-5Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 200

4-6Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 200

4-7Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 200

4-8Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 200

4-9Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 200

4-10Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-11Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

iBrooks® Mf SeriesContentsInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Paragraph PageNumber NumberSection

4-12Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-13Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-14Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-15Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-16Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-17Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-18Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-19Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-20Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-21Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

iiBrooks® Mf SeriesContents Installation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure PageNumber Number1-1 Princ

4-22Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-23Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-24Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-25Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

4-26Brooks® Mf SeriesSection 4 Maintenance &TroubleshootingInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20

5-1Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20095-1 GeneralWhen order

5-2Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure 5-1 Model Mf50

5-3Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure 5-2 Model Mf51

5-4Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Figure 5-3 Model Mf53

5-5Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Table 5-1 Mf Series C

iiiBrooks® Mf SeriesContentsInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009TablesTable PageNumber Number1-1

5-6Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Table 5-2 Mf50/60 Rep

5-7Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Table 5-3 Mf51/61 Rep

5-8Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Table 5-4 Mf53/63 Rep

5-9Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Table 5-5 Mf Series T

5-10Brooks® Mf SeriesSection 5 Parts ListInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009THIS PAGE WASINTENTI

A-1Brooks® Mf SeriesSection A, CE Certification ofMass Flow EquipmentInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugu

A-2Brooks® Mf SeriesSection A, CE Certification ofMass Flow EquipmentInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugu

A-3Brooks® Mf SeriesSection A, CE Certification ofMass Flow EquipmentInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugu

A-4Brooks® Mf SeriesSection A, CE Certification ofMass Flow EquipmentInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugu

A-5Brooks® Mf SeriesSection A, CE Certification ofMass Flow EquipmentInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugu

ivBrooks® Mf SeriesContents Installation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009THIS PAGE WASINTENTIONALLYLEFT BL

A-6Brooks® Mf SeriesSection A, CE Certification ofMass Flow EquipmentInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugu

Installation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Brooks® Mf SeriesTHIS PAGE WASINTENTIONALLYLEFT BLANK

Installation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 2009Brooks® Mf SeriesTRADEMARKSBrooks ...

1-1Section 1 IntroductionBrooks® Mf SeriesInstallation and Operation ManualX-TMF-Mfi-Mfx-MFC-engPart Number: 541B074AAGAugust, 20091-1 DescriptionThe