Brooks-instrument 5850i User Manual

Installation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Brooks® Model 5850iModel 5850iMass Flow Controller

1-4Brooks® Model 5850iSection 1 IntroductionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Temperature Sensi

2-1Brooks® Model 5850iSection 2 InstallationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20082-1 Receipt of Eq

2-2Brooks® Model 5850iSection 2 InstallationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20082-3 Return Shipme

2-3Brooks® Model 5850iSection 2 InstallationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20082-5 Installation

2-4Brooks® Model 5850iSection 2 InstallationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Note: The control

2-5Brooks® Model 5850iSection 2 InstallationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20082-7 Electrical In

2-6Brooks® Model 5850iSection 2 InstallationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Signal OutputThe

2-7Brooks® Model 5850iSection 2 InstallationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Chassis GroundCon

2-8Brooks® Model 5850iSection 2 InstallationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20082-8 Configuring t

3-1Brooks® Model 5850iSection 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20083-1 Theory of Operat

Installation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Brooks® Model 5850iESD (Electrostatic Discharge)Essential Ins

Brooks® Model 5850i3-2Section 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Soft Start enabled b

3-3Brooks® Model 5850iSection 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20083-3 Zero AdjustmentE

Brooks® Model 5850i3-4Section 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20083-4 Calibration Proc

3-5Brooks® Model 5850iSection 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008f. Connect the DVM p

Brooks® Model 5850i3-6Section 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Figure 3-3 Model 585

3-7Brooks® Model 5850iSection 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Figure 3-5 PC Board

Brooks® Model 5850i3-8Section 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20082. If the error is g

3-9Brooks® Model 5850iSection 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008and 0% flow indicate

Brooks® Model 5850i3-10Section 3 OperationInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008THIS PAGE WASINTENT

4-1Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20084-1 GeneralNo rout

Installation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Brooks® Model 5850iDear Customer,We appreciate this opportuni

Brooks® Model 5850i4-2Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Trouble Possible C

4-3Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Sensor Troubleshoo

Brooks® Model 5850i4-4Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Table 4-2 Sensor T

4-5Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Figure 4-2a Valve

Brooks® Model 5850i4-6Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Figure 4-2b Valve

4-7Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20084-3 Sensor TubeThe

Brooks® Model 5850i4-8Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20086. Remove and note

4-9Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 200810.Unplug the sens

Brooks® Model 5850i4-10Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Tighten the assem

4-11Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008and the total tra

Installation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Brooks® Model 5850iTHIS PAGE WASINTENTIONALLYLEFT BLANK

Brooks® Model 5850i4-12Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20084-5 Use of the Co

4-13Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Table 4-3 Convers

Brooks® Model 5850i4-14Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Table 4-3 Convers

4-15Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20084-6 Use of Orific

Brooks® Model 5850i4-16Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Example: What is

4-17Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Table 4-4 Model 5

Brooks® Model 5850i4-18Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Figure 4-4 Exampl

4-19Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008conditions. If th

Brooks® Model 5850i4-20Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Table 4-5 Model 5

4-21Brooks® Model 5850iSection 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Materials: BMT =

iBrooks® Model 5850iContentsInstallation and Operation ManualX -TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Section 1IntroductionParagraph P

Brooks® Model 5850i4-22Section 4 MaintenanceInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008THIS PAGE WASINTE

5-1Brooks® Model 5850iSection 5 Parts ListInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008 5-1 GeneralWhen o

Installation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Brooks® Model 5850i5-2Section 5 Parts ListItem Qty. Descripti

5-3Brooks® Model 5850iSection 5 Parts ListInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Table 5-1 Model 585

Installation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Brooks® Model 5850i5-4Section 5 Parts ListTHIS PAGE WASINTENT

A-1Brooks® Model 5850iSection A CE CertifictionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008DanskBrooks I

Brooks® Model 5850iA-2Section A CE CertifictionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008EnglishBrooks

A-3Brooks® Model 5850iSection A CE CertifictionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008FrançaisBrook

Brooks® Model 5850iA-4Section A CE CertifictionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008NederlandsBro

A-5Brooks® Model 5850iSection A CE CertifictionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008NorskBrooks I

iiBrooks® Model 5850iContentsInstallation and Operation ManualX -TMF-5850i-MFC-engPart Number:541B108AAGDecember, 2008FiguresFigure PageNumber Number1

Brooks® Model 5850iA-6Section A CE CertifictionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008SuomiBrooks I

Brooks® Model 5850iInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008THIS PAGE WASINTENTIONALLYLEFT BLANK

Brooks® Model 5850iInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008TRADEMARKSBrooks...

1-1Brooks® Model 5850iSection 1 IntroductionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20081-1 PurposeThe Br

1-2Brooks® Model 5850iSection 1 IntroductionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 2008Figure 1-1 Comman

1-3Brooks® Model 5850iSection 1 IntroductionInstallation and Operation ManualX-TMF-5850i-MFC-engPart Number: 541B108AAGDecember, 20081-3 Specification