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Brooks-instrument 5866M manuals

Owner’s manuals and user’s guides for Hardware Brooks-instrument 5866M.
We providing 1 pdf manuals Brooks-instrument 5866M for download free by document types: User Manual


Brooks instrument 5866M User Manual (65 pages)


Brand: Brooks-instrument | Category: Hardware | Size: 1.59 MB |

 

Table of contents

Compact Pressure Controller

1

Contents

2

Introduction

4

Upstream Outlet

6

(Downstream Inlet)

6

Valve Height w/

6

Downstream Adapter

6

Model 5866E

7

Pressure Controller

7

Vacuum Pump

8

Mass Flow

8

Controllers

8

1-4 Specifications

9

1-5 Controller Specifications

10

Installation

12

2-5 Installation

13

2-6 In-Line Filter

14

2-7 Electrical Interface

14

2-12 Valve Test Point

16

2-9 Valve Override

16

2-10 Precision 5V Reference

16

2-11 Remote Transducer Input

16

2-13 Optional Valve Return

17

Operation

18

Integral Control

19

Figure 3-3. Integral Control

20

Figure 3-4. P.I. Control

21

Maintenance

22

Troubleshooting

24

5-3 Disassembly

25

5-4 Assembly

28

5-6 Orifice Sizing

35

Model 5850E

37

Mass Flow Controller

37

500 sccm, Full Scale

37

Calibration

38

Factor of the New Gas

39

Factor of the Calibration Gas

39

Ref. No. J-836D508

41

Parts List

44

Model 5866

50

Thermal Mass Flow

62

Common Body Dimensions

62

TMF Common Body Dimensions

63




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